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Shipley Company
New Microelectronics Research & Development Facility
Total Square Feet: 64,000 s/f

Project Description: Turn-key design and construction of a new, ground-up Microelectronics Research and Development Lab Facility, including a 2-story office/admin building and 3-level R&D fabrication building. Initial ATC programs are focused on fast-cycle of new 193nm photoresists and antireflectant coatings. Further programs will include work on low-k dielectrics, copper interconnect and lithography materials to support 157nm, EUV and e-beam technologies.

Project Features:
  • 5,000 s/f Class 10 "ballroom" cleanroom on waffle slab with a mechanical equipment mezzanine above and a process basement below
  • Very tight tolerances on temperature, relative humidity, noise, vibration, and molecular out-gassing
  • Modular cleanroom design allows doubling facility size for future expansion
    • Project Images
    Testimonials
    "I have no doubt that were it not for the technical expertise, project management skill and construction professionalism of JMC's team, this very sophisticated facility could not have met the metrics of success to which the project held, and have been completed on time and within budget."
    - Director, Physical Plant, Shipley Company
    Corporate Headquarters  \  20 Powder Mill Road  \  Maynard, MA 01754  \  Phone: (978) 461-0330  \  Fax: (978) 461-0275
    Regional Office  \  1 Trap Falls Road, Suite 1101  \  Shelton, CT 06484  \  Phone: (203) 926-9598  \  Fax: (203) 926-9906
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