Northeastern University
Boston, MA
JM Coull constructed the Kostas Center to be Northeastern's primary facility for micro and nano-fabrication. The facility provides support and materials to students, faculty, researchers, co-op students, and external users, and has the capabilities of processing 3, 4, and 6 inch wafers. Applications range from nanoelectronics, nanodevices, sensors, energy storage, and nano electromechanical systems to exploration studies in fundamental science and engineering.
George J. Kostas Nanoscale Technology & Manufacturing Research Center
Project Features
- 5,000 sf total
- ISO 4, 6, & 7 cleanroom labs for optical lithography, nanolithography, thin film deposition, furnace processes, wet chemical processes, megasonic & ultrasonic cleaning, ICP plasma etching, ion milling & characterization
- Non-clean lab space with hoods, device testing areas, and imaging lab
- Collaborative project area
- Completed in constrained area on busy, occupied college campus
- Difficult access to lab, requiring careful coordination of deliveries
JM Coull constructed the Kostas Center to be Northeastern's primary facility for micro and nano-fabrication. The facility provides support and materials to students, faculty, researchers, co-op students, and external users, and has the capabilities of processing 3, 4, and 6 inch wafers. Applications range from nanoelectronics, nanodevices, sensors, energy storage, and nano electromechanical systems to exploration studies in fundamental science and engineering.